HERMES-IR : Research & Education Resources >
070 Working Papers = ワーキングペーパー >
IIR Working Paper >

Please use this identifier to cite or link to this item:

Files in This Item:

File Description SizeFormat
070iirWP13_10.pdf2507KbAdobe PDF
Title: 半導体R&Dシステムのオープン化:F2リソグラフィ事例に学ぶ
Authors: 東川, 巌
Issue Date: Mar-2013
Publisher: Institute of Innovation Research, Hitotsubashi University
Physical Description: 44 p.
Series/Report no.: IIR Working Paper ; No. 13-10
Language: jpn
Text Version: publisher
Appears in Collections:IIR Working Paper

Items in HERMES-IR are protected by copyright, with all rights reserved, unless otherwise indicated.


Valid XHTML 1.0! DSpace Software Copyright © 2002-2006 MIT and Hewlett-Packard - Feedback